Shutdown epi2 SNF 2011-08-24 17:32:16: Ch. A main surubber fault - gas flow problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Aug 24 17:56:51 PDT 2011


Reset main scrubber.  Unloaded the user's wafer and placed in her wafer box (slot 1).




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