Problem epi2 SNF 2011-08-28 15:03:02: ChA bulb failed in upper outer zone

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Sun Aug 28 15:03:02 PDT 2011


Encountered warning: "ChA SiD rp pressure not stabilized" a few time during etchcoat.
Later "ChA bulb failed in upper outer zone" popped up and couldn't proceed. 




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