August 2011 Archives by thread

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Starting: Mon Aug 1 05:58:38 PDT 2011
Ending: Wed Aug 31 11:39:16 PDT 2011
Messages: 58

• Problem epi2 SNF 2011-08-01 05:58:37: GeH4 is Empty   tberg at snf.stanford.edu
  • Problem epi2 SNF 2011-08-01 05:58:37: GeH4 is Empty   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-01 06:57:43: GeH4 is changed and in leak check   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-08-01 06:57:43: GeH4 is changed and in leak check   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-01 11:19:59:   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-08-01 11:19:59:   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-01 12:18:21: LLA and LLB cassette were interchanged   zpatel at snf.stanford.edu
  • Comment epi2 SNF 2011-08-01 12:18:21: LLA and LLB cassette were interchanged   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-01 18:11:36: LLA not venting to atm   zpatel at snf.stanford.edu
  • Comment epi2 SNF 2011-08-01 18:11:36: LLA not venting to atm   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-08-03 15:06:21: Wafer lost in chamber P9   zpatel at snf.stanford.edu
  • Shutdown epi2 SNF 2011-08-03 15:06:21: Wafer lost in chamber P9   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-08 06:01:47: HCl is empty   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-08-08 06:01:47: HCl is empty   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-08-08 06:15:15: HCL empty   tberg at snf.stanford.edu
  • Shutdown epi2 SNF 2011-08-08 06:15:15: HCL empty   tberg at snf.stanford.edu
• HCL Cylinder changed in leak check   Ted Berg
• Comment epi2 SNF 2011-08-08 06:59:49: HCL cylinder changed in leak check   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-08-08 06:59:49: HCL cylinder changed in leak check   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-07-26 02:08:12: LLA and LLB issues   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-08-09 10:14:24: ran out of 100ppm Borane during run   ehe at snf.stanford.edu
  • Problem epi2 SNF 2011-08-09 10:14:24: ran out of 100ppm Borane during run   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-09 10:15:29: wafer stuck in chA due to faults   ehe at snf.stanford.edu
  • Comment epi2 SNF 2011-08-09 10:15:29: wafer stuck in chA due to faults   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-09 10:16:51: good news   ehe at snf.stanford.edu
  • Comment epi2 SNF 2011-08-09 10:16:51: good news   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-09 11:08:15: changed 100 ppm diborane cylinder   seymour at snf.stanford.edu
  • Comment epi2 SNF 2011-08-09 11:08:15: changed 100 ppm diborane cylinder   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-08-09 15:43:08: Blown power supply   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2011-08-09 15:43:08: Blown power supply   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-08-10 14:42:41: repeated bulb failure error   grahamab at snf.stanford.edu
  • Shutdown epi2 SNF 2011-08-10 14:42:41: repeated bulb failure error   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-08-14 01:27:20: DCS deviated by 100%   dongrip at snf.stanford.edu
  • Problem epi2 SNF 2011-08-14 01:27:20: DCS deviated by 100%   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-14 14:24:31: Used Ge etch coat - Si for cleaning recipe   narii at snf.stanford.edu
  • Comment epi2 SNF 2011-08-14 14:24:31: Used Ge etch coat - Si for cleaning recipe   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-15 07:33:44: no DCS at this time   tberg at snf.stanford.edu
  • Comment epi2 SNF 2011-08-15 07:33:44: no DCS at this time   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-08-16 21:25:54: wafers not detected in automatic   ehe at snf.stanford.edu
  • Problem epi2 SNF 2011-08-16 21:25:54: wafers not detected in automatic   tberg at snf.stanford.edu
• Reservations released testing done   Ted Berg
• Comment epi2 SNF 2011-06-14 10:40:52: recommend running multiple etches   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-08-23 16:14:54: main scrubber gas fault   edfei at snf.stanford.edu
  • Shutdown epi2 SNF 2011-08-23 16:14:54: main scrubber gas fault   seymour at snf.stanford.edu
• Shutdown epi2 SNF 2011-08-24 17:32:16: Ch. A main surubber fault - gas flow problem   cfchiang at snf.stanford.edu
  • Shutdown epi2 SNF 2011-08-24 17:32:16: Ch. A main surubber fault - gas flow problem   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2011-08-25 15:05:07: Ch A main scrubber fault   junam at snf.stanford.edu
  • Problem epi2 SNF 2011-08-25 15:05:07: Ch A main scrubber fault   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-08-25 19:13:17: processed without problems   cfchiang at snf.stanford.edu
• Problem epi2 SNF 2011-08-27 13:14:12: hazy growth   ehe at snf.stanford.edu
  • Problem epi2 SNF 2011-08-27 13:14:12: hazy growth   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-08-28 15:03:02: ChA bulb failed in upper outer zone   cfchiang at snf.stanford.edu
  • Problem epi2 SNF 2011-08-28 15:03:02: ChA bulb failed in upper outer zone   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-08-28 16:31:14: ChA bulb failed in upper outer zone   junam at snf.stanford.edu
  • Problem epi2 SNF 2011-08-28 16:31:14: ChA bulb failed in upper outer zone   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-08-29 06:06:32: bad lamps   tberg at snf.stanford.edu
  • Shutdown epi2 SNF 2011-08-29 06:06:32: bad lamps   tberg at snf.stanford.edu
• Reservations removed   Ted Berg

Last message date: Wed Aug 31 11:39:16 PDT 2011
Archived on: Sun Dec 23 08:53:00 PST 2012

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