Problem epi2 SNF 2011-11-26 19:46:44: SiH4 flow deviation 12% - out of gas?

tberg at snf.stanford.edu tberg at snf.stanford.edu
Tue Dec 6 07:27:48 PST 2011

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gas is fine

Previous message: Problem epi2 SNF 2011-12-06 06:30:42: SiH4 deviation 100% Auto Mode fault
Next message: Shutdown epi2 SNF 2011-12-07 08:38:44: scrubber fault
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