Problem epi2 SNF 2011-12-06 06:30:42: SiH4 deviation 100% Auto Mode fault

tberg at snf.stanford.edu tberg at snf.stanford.edu
Tue Dec 6 07:28:58 PST 2011


Reset SiH4 controller in the gas vault. Ran flow manually fine. Ran
 GeEtch coat no problem.




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