Comment epi2 SNF 2011-02-01 10:01:53: Changed SiH4 cylinder
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Wed Feb 2 09:06:33 PST 2011
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Comment epi2 SNF 2011-02-01 10:01:53: Changed SiH4 cylinder
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Shutdown epi2 SNF 2011-01-31 09:39:45: pump out for repair
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cylinder passes leak check and is now on to the tool
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Comment epi2 SNF 2011-02-01 10:01:53: Changed SiH4 cylinder
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Shutdown epi2 SNF 2011-01-31 09:39:45: pump out for repair
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