Shutdown epi2 SNF 2011-01-31 09:39:45: pump out for repair
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Feb 2 13:44:13 PST 2011
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Comment epi2 SNF 2011-02-01 10:01:53: Changed SiH4 cylinder
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Comment epi2 SNF 2011-01-28 15:18:50: blower not working/
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Pump is back and installed. Ran dop test and no problem
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Comment epi2 SNF 2011-02-01 10:01:53: Changed SiH4 cylinder
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Comment epi2 SNF 2011-01-28 15:18:50: blower not working/
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