Comment epi2 SNF 2011-01-28 15:18:50: blower not working/
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Feb 2 13:44:28 PST 2011
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Shutdown epi2 SNF 2011-01-31 09:39:45: pump out for repair
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Problem epi2 SNF 2011-02-03 08:59:14: overpressure during etch
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Pump is back and installed. Ran dop test and no problem
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Shutdown epi2 SNF 2011-01-31 09:39:45: pump out for repair
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Problem epi2 SNF 2011-02-03 08:59:14: overpressure during etch
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