Problem epi2 SNF 2011-02-03 08:59:14: overpressure during etch

ehe at snf.stanford.edu ehe at snf.stanford.edu
Thu Feb 3 08:59:14 PST 2011


recipe ran ok with normal pressure settings, but the following etch recipe aborted after 3 mins due to "over pressure detected by hardware interlock"




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