Problem epi2 SNF 2011-02-03 08:59:14: overpressure during etch
ehe at snf.stanford.edu
ehe at snf.stanford.edu
Thu Feb 3 08:59:14 PST 2011
recipe ran ok with normal pressure settings, but the following etch recipe aborted after 3 mins due to "over pressure detected by hardware interlock"
More information about the epi2-pcs
mailing list