Problem epi2 SNF 2011-02-03 13:12:25: ChA not go to online

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Thu Feb 3 13:12:25 PST 2011


Pressure deviation error (High pressure) during GE ETCHCOAT happens again.
ChA is isolated.
I try to go CHA to Online mode , but I can't




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