Shutdown epi2 SNF 2011-02-03 14:53:49: Cannot control pressure at 600 T
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Thu Feb 3 14:53:50 PST 2011
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Problem epi2 SNF 2011-02-03 13:56:28: Over Pressure error
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Shutdown epi2 SNF 2011-02-03 14:53:49: Cannot control pressure at 600 T
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Aborts during etch coat
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Problem epi2 SNF 2011-02-03 13:56:28: Over Pressure error
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Shutdown epi2 SNF 2011-02-03 14:53:49: Cannot control pressure at 600 T
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