Comment epi2 SNF 2011-02-04 10:16:16: Update

tberg at snf.stanford.edu tberg at snf.stanford.edu
Fri Feb 4 10:16:16 PST 2011

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Cleaned throttle valve-there wasn't much in it. Checked PIds for              pressure. Looking into pump at this time. still cant handle etch-coat
 recipe.

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