Problem epi2 SNF 2011-02-08 00:39:54: LLA Pump

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Tue Feb 8 00:39:54 PST 2011


Previous user could not get wafers out from LLA, which is at atmospheric pressure.  It seems to be homing but doesn't complete, and gives an error message about LLA pump failing and turned off.
I'm running my process now using LLB.




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