Problem epi2 SNF 2011-02-08 00:39:54: LLA Pump

jasonlin at jasonlin at
Tue Feb 8 00:39:54 PST 2011

Previous user could not get wafers out from LLA, which is at atmospheric pressure.  It seems to be homing but doesn't complete, and gives an error message about LLA pump failing and turned off.
I'm running my process now using LLB.

More information about the epi2-pcs mailing list