Problem epi2 SNF 2011-02-08 10:07:15: ChA overpressure

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Tue Feb 8 10:07:16 PST 2011


ChA overpressure fault during Ge Etch Coat recipe (after 3 out of 4 wafers had finished successfully).




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