Comment epi2 SNF 2011-02-09 13:46:40: ChA Over Pressure

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Wed Feb 9 13:46:40 PST 2011


I make 2wafers at this run.
GE ETCHCOAT before start my recipe, it was no error.
Etchcoat between wafer #1 and #2, over pressure error was happen.
I tried chA reset and etchcoat again. Then next etchcoat run was no error.
After all my recipe, final etchcoat run was also no error.
But pressure during etchcoat was oscillated from 540~750 Torr.




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