Problem epi2 SNF 2011-02-20 13:03:31: Cannot run Chamber cleanning recipes

wangss at snf.stanford.edu wangss at snf.stanford.edu
Sun Feb 20 13:03:32 PST 2011


Both GE ETCH COAT and ETCHCOAT_CHA can not be run through. The chamber pressure can not reach setup point 600Torr at the first step (Purge). The process abort automatically.




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