Shutdown epi2 SNF 2011-02-21 17:30:25: Wafer in Transfer ARM

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Mon Feb 21 17:30:25 PST 2011


Wafer in transfer ARM:
Not able to move wafer to either LLA or LLB
Error message: Motor syncronization lost, Transfer robot bot/rot all motion halted




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