Comment epi2 SNF 2011-02-24 17:35:39: wafer handling seems okay

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Feb 24 17:35:39 PST 2011


Ran 3 wafers for a total of 5 depositions without any handling problems.  Also got no overpressure errors despite running several chamber cleans and recipes that deposit at 600Torr.  




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