Problem epi2 SNF 2011-02-25 21:08:03: Load lock A stepper failed

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sat Feb 26 17:13:43 PST 2011


homed both cassette elevators.
loaded  a wafer from both loadlocks into the process chamber and then back into the loadloaks.
Don't know how both loadlocks could lose calibration...seems ok now.




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