Problem epi2 SNF 2011-02-27 02:53:16: LLA mapping error & wafer stuck in Ch A

junam at snf.stanford.edu junam at snf.stanford.edu
Sun Feb 27 02:53:16 PST 2011


LLA mapping error occurred. Used LLB instead, but "Chamber A lift cannot reach process position" error occurred. Wafer stuck in chamber A.




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