Problem epi2 SNF 2011-02-27 02:53:16: LLA mapping error & wafer stuck in Ch A

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Feb 28 10:49:57 PST 2011


Homed lift.
Moved wafer in and out of chamber 10 times without an error.
Please report if it happens again.  We may need to call AMAT FS.




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