Shutdown epi2 SNF 2011-02-28 18:11:59: wafer stuck in Chamber A

edfei at snf.stanford.edu edfei at snf.stanford.edu
Mon Feb 28 18:11:59 PST 2011


Process lift error on first wafer.  Was able to successfully re-home the lift and reset the chamber, but could no longer move or process the wafer that went to ChA.




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