February 2011 Archives by author

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Starting: Tue Feb 1 10:01:53 PST 2011
Ending: Mon Feb 28 18:11:59 PST 2011
Messages: 49

• DCS is low   Ted Berg
• HCL cylinder change   Ted Berg
• Comment epi2 SNF 2011-02-27 17:44:29: Chamber A Lift Problem   dwnam at snf.stanford.edu
• Problem epi2 SNF 2011-02-28 00:16:17: ChA lifting problem   dwnam at snf.stanford.edu
• Shutdown epi2 SNF 2011-02-28 18:11:59: wafer stuck in Chamber A   edfei at snf.stanford.edu
• Problem epi2 SNF 2011-02-03 08:59:14: overpressure during etch   ehe at snf.stanford.edu
• Comment epi2 SNF 2011-02-24 17:35:39: wafer handling seems okay   grahamab at snf.stanford.edu
• Problem epi2 SNF 2011-02-08 00:39:54: LLA Pump   jasonlin at snf.stanford.edu
• Problem epi2 SNF 2011-02-08 10:07:15: ChA overpressure   jasonlin at snf.stanford.edu
• Problem epi2 SNF 2011-02-26 00:57:59: LLA and LLB   junam at snf.stanford.edu
• Problem epi2 SNF 2011-02-27 02:53:16: LLA mapping error & wafer stuck in Ch A   junam at snf.stanford.edu
• Problem epi2 SNF 2011-02-03 08:59:14: overpressure during etch   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-02-22 14:20:20: broken wafer and wand in chamber F   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-02-26 00:57:59: LLA and LLB   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-02-25 21:08:03: Load lock A stepper failed   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-02-28 00:16:17: ChA lifting problem   maurice at snf.stanford.edu
• Problem epi2 SNF 2011-02-27 02:53:16: LLA mapping error & wafer stuck in Ch A   maurice at snf.stanford.edu
• Comment epi2 SNF 2011-02-01 10:01:53: Changed SiH4 cylinder   seymour at snf.stanford.edu
• Shutdown epi2 SNF 2011-02-15 13:12:50: Changing HCL while DCS is down   seymour at snf.stanford.edu
• Comment epi2 SNF 2011-02-16 07:57:17: HCL in leak test   seymour at snf.stanford.edu
• Problem epi2 SNF 2011-02-03 13:12:25: ChA not go to online   takashifuse at snf.stanford.edu
• Problem epi2 SNF 2011-02-03 13:56:28: Over Pressure error   takashifuse at snf.stanford.edu
• Comment epi2 SNF 2011-02-09 13:46:40: ChA Over Pressure   takashifuse at snf.stanford.edu
• Problem epi2 SNF 2011-02-25 21:08:03: Load lock A stepper failed   takashifuse at snf.stanford.edu
• Comment epi2 SNF 2011-02-01 10:01:53: Changed SiH4 cylinder   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-01-31 09:39:45: pump out for repair   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-01-28 15:18:50: blower not working/   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-02-03 14:53:49: Cannot control pressure at 600 T   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-04 10:16:16: Update   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-04 14:23:58: Checked out pump   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-02-03 14:53:49: Cannot control pressure at 600 T   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-04 10:16:16: Update   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-04 14:23:58: Checked out pump   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-02-03 13:56:28: Over Pressure error   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-02-03 13:12:25: ChA not go to online   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-14 10:20:38: DCS is low   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-15 12:22:20: DCS is empty   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-02-15 13:12:50: Changing HCL while DCS is down   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-14 10:20:38: DCS is low   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-15 12:22:20: DCS is empty   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-16 07:57:17: HCL in leak test   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-02-20 13:03:31: Cannot run Chamber cleanning recipes   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-02-08 10:07:15: ChA overpressure   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-09 13:46:40: ChA Over Pressure   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-23 14:48:19: FS is here   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-02-21 17:30:25: Wafer in Transfer ARM   tberg at snf.stanford.edu
• Comment epi2 SNF 2011-02-24 14:50:32: lifter is having issues   tberg at snf.stanford.edu
• Problem epi2 SNF 2011-02-20 13:03:31: Cannot run Chamber cleanning recipes   wangss at snf.stanford.edu
• Shutdown epi2 SNF 2011-02-21 17:30:25: Wafer in Transfer ARM   zpatel at snf.stanford.edu

Last message date: Mon Feb 28 18:11:59 PST 2011
Archived on: Sun Dec 23 08:52:58 PST 2012

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