From maurice at snf.stanford.edu Mon Jan 3 16:29:31 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 3 Jan 2011 16:29:31 -0800 Subject: Shutdown epi2 SNF 2011-01-03 16:29:31: lower lamp failure during testing Message-ID: From tberg at snf.stanford.edu Tue Jan 4 14:17:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 4 Jan 2011 14:17:25 -0800 Subject: Comment epi2 SNF 2011-01-04 14:17:24: Changed all lower lamps Message-ID: Changed all lower lamps and ran leak check and hot/active idle. Still testing system From tberg at snf.stanford.edu Wed Jan 5 14:16:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:16:11 -0800 Subject: Comment epi2 SNF 2011-01-05 14:16:10: Testing HCl gas panel Message-ID: From tberg at snf.stanford.edu Fri Jan 7 07:27:02 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 7 Jan 2011 07:27:02 -0800 Subject: Shutdown epi2 SNF 2011-01-03 16:29:31: lower lamp failure during testing Message-ID: Replaced all lower lamps, ran GE etch coat recipe no problem-needs Qual From tberg at snf.stanford.edu Fri Jan 7 07:27:52 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 7 Jan 2011 07:27:52 -0800 Subject: Problem epi2 SNF 2010-12-22 10:31:19: no gases at this time Message-ID: Replaced all lower lamps, ran GE etch coat recipe no problem-needs Qual From tberg at snf.stanford.edu Fri Jan 7 07:28:00 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 7 Jan 2011 07:28:00 -0800 Subject: Comment epi2 SNF 2011-01-04 14:17:24: Changed all lower lamps Message-ID: Replaced all lower lamps, ran GE etch coat recipe no problem-needs Qual From tberg at snf.stanford.edu Fri Jan 7 07:28:18 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 7 Jan 2011 07:28:18 -0800 Subject: Comment epi2 SNF 2011-01-05 14:16:10: Testing HCl gas panel Message-ID: gas back on-Replaced all lower lamps, ran GE etch coat recipe no problem-needs Qual From tberg at snf.stanford.edu Fri Jan 7 07:28:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 7 Jan 2011 07:28:41 -0800 Subject: Comment epi2 SNF 2010-12-02 09:47:49: Epi update Message-ID: completed From tberg at snf.stanford.edu Fri Jan 7 07:29:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 7 Jan 2011 07:29:03 -0800 Subject: Problem epi2 SNF 2011-01-07 07:29:01: Needs Qual Message-ID: From maurice at snf.stanford.edu Fri Jan 7 16:59:25 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Jan 2011 16:59:25 -0800 Subject: Problem epi2 SNF 2011-01-07 07:29:01: Needs Qual Message-ID: Standard test came out haze free. I had several pressure diviation errors that put system in isolation. I had an overpressure error on my last GeEtch. The three GeEtches earlier in the day had no problems. _ I am yellow lighting the system. Users may have pressure issues. Please make comments on coral if you have problems so we can addreess them next week. From maurice at snf.stanford.edu Fri Jan 7 17:00:32 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Jan 2011 17:00:32 -0800 Subject: Comment epi2 SNF 2010-12-14 12:55:00: Flatfinder is Messed up-DO NOT USE Message-ID: Ted has replaced the auto flat finder with a clean manual flat finder From maurice at snf.stanford.edu Fri Jan 7 17:07:48 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 7 Jan 2011 17:07:48 -0800 Subject: Problem epi2 SNF 2011-01-07 17:07:48: Pressure deviation errors Message-ID: Standard test came out haze free. I had several pressure diviation errors that put system in isolation. I had an overpressure error on my last GeEtch. The three GeEtches earlier in the day had no problems. _ I am yellow lighting the system. Users may have pressure issues. Please make comments on coral if you have problems so we can addreess them next week. From zpatel at snf.stanford.edu Sun Jan 9 15:50:06 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Sun, 9 Jan 2011 15:50:06 -0800 Subject: Problem epi2 SNF 2011-01-09 15:50:05: No Dopant gas flows ??? Message-ID: There is no Dopant gas flows for Phosphine and Diborane. Valves are open there is no pressure. From tberg at snf.stanford.edu Mon Jan 10 06:42:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Jan 2011 06:42:40 -0800 Subject: Problem epi2 SNF 2011-01-09 15:50:05: No Dopant gas flows ??? Message-ID: Restored dopant gases From zpatel at snf.stanford.edu Tue Jan 11 12:14:44 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Tue, 11 Jan 2011 12:14:44 -0800 Subject: Problem epi2 SNF 2011-01-11 12:14:43: Ge flow Message-ID: Cannot run Ge flow of 2 sccm with Silane flow of 400sccm Was able to run the same flows yesterday. (same reciepe) From tberg at snf.stanford.edu Tue Jan 11 12:32:17 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 11 Jan 2011 12:32:17 -0800 Subject: Problem epi2 SNF 2011-01-11 12:32:17: GeH4 is Empty Message-ID: GeH4 is Empty replacing Cylinder From seymour at snf.stanford.edu Wed Jan 12 07:18:54 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Jan 2011 07:18:54 -0800 Subject: Problem epi2 SNF 2010-12-14 12:07:21: Flat aligner contaminating the wafers Message-ID: flat aligner was replaced From seymour at snf.stanford.edu Wed Jan 12 07:19:28 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Jan 2011 07:19:28 -0800 Subject: Problem epi2 SNF 2011-01-11 12:14:43: Ge flow Message-ID: cylinder replaced From seymour at snf.stanford.edu Wed Jan 12 07:20:04 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Jan 2011 07:20:04 -0800 Subject: Comment epi2 SNF 2010-11-28 09:40:11: Reset DCS excess flow switch. Message-ID: excess flow sensor replaced From seymour at snf.stanford.edu Wed Jan 12 07:20:32 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Jan 2011 07:20:32 -0800 Subject: Problem epi2 SNF 2011-01-11 12:32:17: GeH4 is Empty Message-ID: cylinder replaced From maurice at snf.stanford.edu Wed Jan 12 09:15:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 12 Jan 2011 09:15:05 -0800 Subject: Shutdown epi2 SNF 2011-01-12 09:15:04: scrubber leak Message-ID: From maurice at snf.stanford.edu Wed Jan 12 10:38:21 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 12 Jan 2011 10:38:21 -0800 Subject: Shutdown epi2 SNF 2011-01-12 09:15:04: scrubber leak Message-ID: Ted reports that the restriction at the scrubber inlet has been cleared and the water leak has stopped. I t will be monitored for additional problems From maurice at snf.stanford.edu Wed Jan 12 10:50:48 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 12 Jan 2011 10:50:48 -0800 Subject: Problem epi2 SNF 2010-12-08 10:39:04: Pressure deviation Message-ID: This was a reporting a pressure problem with the Ge etch program. The program has been modified and is not giving any problems. From takashifuse at snf.stanford.edu Thu Jan 13 07:44:00 2011 From: takashifuse at snf.stanford.edu (takashifuse at snf.stanford.edu) Date: Thu, 13 Jan 2011 07:44:00 -0800 Subject: Problem epi2 SNF 2011-01-13 07:44:00: Fatal fault of wafer from Loadlock A slot 1 Message-ID: Preveous user's process was stopped by error of "Fatal fault of wafer from Load lock A slot 1 - 158" and " Pressure deviation". Please recover the tool. From maurice at snf.stanford.edu Thu Jan 13 08:55:54 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Jan 2011 08:55:54 -0800 Subject: Problem epi2 SNF 2011-01-13 07:44:00: Fatal fault of wafer from Loadlock A slot 1 Message-ID: removed junam's wafers brought system back online From takashifuse at snf.stanford.edu Thu Jan 13 10:47:59 2011 From: takashifuse at snf.stanford.edu (takashifuse at snf.stanford.edu) Date: Thu, 13 Jan 2011 10:47:59 -0800 Subject: Problem epi2 SNF 2011-01-13 10:47:59: Pressure does not go down to 15 Torr Message-ID: My recipe didn't run by error of pressure deviation. The recipe is 25slm H2 flow and 15 Torr pressure, but the chamber pressure is not going down to 15 torr... it was going to about 45 Torr. From edfei at snf.stanford.edu Thu Jan 13 15:14:15 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:14:15 -0800 Subject: Comment epi2 SNF 2011-01-13 15:14:14: Pressure Deviation Message-ID: Chamber pressure will not go down to set point and gives a pressure deviation warning. set point of 40T will result in about 55T chamber pressure, and set point of 15T will end the recipe and set the chamber in isolation. From edfei at snf.stanford.edu Fri Jan 14 10:49:00 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Fri, 14 Jan 2011 10:49:00 -0800 Subject: Problem epi2 SNF 2011-01-14 10:49:00: ChA Pressure control Valve Message-ID: recipe failed due to "ChA Pressure Control Valve failed to close" From ehe at snf.stanford.edu Sat Jan 15 14:32:32 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 15 Jan 2011 14:32:32 -0800 Subject: Problem epi2 SNF 2011-01-15 14:32:32: repeat problem: chA valve Message-ID: chA press cont vavle never reached home sensor in minus direction chA pressure setpoint deviation fault ChA pressure control valve failed to close Ge Etch was fine but these errors cropped up at the beginning of every recipe run attempt. Retried several times, no change. From alsune at snf.stanford.edu Tue Jan 18 11:32:43 2011 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 18 Jan 2011 11:32:43 -0800 Subject: Problem epi2 SNF 2011-01-18 11:32:42: ChA Pressure Control Valve failed to close Message-ID: Got error message "ChA Pressure Control Valve failed to close". Upon talking to several lab member it seems that the throttle valve won't go down to 20T. It seems a lot of labmembers have the same problem. From tberg at snf.stanford.edu Tue Jan 18 13:08:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Jan 2011 13:08:10 -0800 Subject: Comment epi2 SNF 2011-01-18 13:08:09: Cleaned Throttle valve Message-ID: Cleaned Throttle valve, rehomed it closes fine now left machine in hot idle From zpatel at snf.stanford.edu Wed Jan 19 19:23:17 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 19 Jan 2011 19:23:17 -0800 Subject: Problem epi2 SNF 2011-01-19 19:23:16: Throttle valve -pressure control Message-ID: Valve not able to handle gas flows Dopant flow test fails when Pressure set at 30T and H2 flow is 30SLM For a H2 flow of 20slm it maintain pressure at 44T (set point is 30T). Deposition at 50 Torr not clean Could be because of concern with pressure control. From ehe at snf.stanford.edu Fri Jan 21 01:22:13 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 21 Jan 2011 01:22:13 -0800 Subject: Comment epi2 SNF 2011-01-21 01:22:12: epi2 running but with pressure issue Message-ID: Pressure issue still needs to be addressed per previous user's comment. Experienced same problem during the dopant flow test recipe - pressure couldn't stabilize below about 50T, so I had to increase pressure on recipes. Trying to run first recipe overnight, will report any errors Fri morning. From maurice at snf.stanford.edu Fri Jan 21 12:21:15 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 21 Jan 2011 12:21:15 -0800 Subject: Shutdown epi2 SNF 2011-01-21 12:21:14: won't go online Message-ID: reduced pressure sensor failed can't home PCV From tberg at snf.stanford.edu Fri Jan 21 14:26:38 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 Jan 2011 14:26:38 -0800 Subject: Comment epi2 SNF 2011-01-21 14:26:38: Cleaned Throttle valve Message-ID: Pulled line secton and cleaned, cleaned and calibrated Throttle valve, in GEetch coat From maurice at snf.stanford.edu Fri Jan 21 16:42:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 21 Jan 2011 16:42:36 -0800 Subject: Shutdown epi2 SNF 2011-01-21 12:21:14: won't go online Message-ID: Ted reports: Pulled line secton and cleaned, cleaned and calibrated Throttle valve, in GEetch coat From ehe at snf.stanford.edu Sat Jan 22 08:18:09 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 22 Jan 2011 08:18:09 -0800 Subject: Comment epi2 SNF 2011-01-22 08:18:08: pressure problem and can't run in automatic Message-ID: Can't run in automatic mode since Thurs night - reports chA not online even though it clearly is. Also chF goes offline when trying to return wafers, chF seemed to be correctable though. ChA pressure errors and ChA pressure valve failed to close error at end of etch recipe. From maurice at snf.stanford.edu Mon Jan 24 09:46:51 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 24 Jan 2011 09:46:51 -0800 Subject: Comment epi2 SNF 2011-01-22 08:18:08: pressure problem and can't run in automatic Message-ID: Ted ran Ge etch with no problem. - I also ran aGe etch with no issues. - System stated is was offline but it was also in active idle?!?! - We then loaded a wafer and ran "KENTEST2" in auto mode. The system loaded wafer, ran program, unloaded wafer and ran Ge etch program with no issues. - KENTEST2 runs with pressure at 30torr and H2 flow of 15 SLM From zpatel at snf.stanford.edu Mon Jan 24 10:29:33 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 24 Jan 2011 10:29:33 -0800 Subject: Comment epi2 SNF 2011-01-24 10:29:33: Wafer in LLA and no Note Message-ID: There is a wafer in LLA without any note From zpatel at snf.stanford.edu Mon Jan 24 11:30:36 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 24 Jan 2011 11:30:36 -0800 Subject: Comment epi2 SNF 2011-01-24 11:30:36: Pressure control Message-ID: Valve not able to handle gas flows Dopant flow test fails when Pressure set at 30T and H2 flow is 30SLM For a H2 flow of 20slm it maintain pressure at 44T (set point is 30T). From tberg at snf.stanford.edu Tue Jan 25 14:33:36 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Jan 2011 14:33:36 -0800 Subject: Comment epi2 SNF 2011-01-25 14:33:35: New Pump arrives tomorrow Message-ID: It looks like the blower on the main pump is bad. New pump should be here tomorrow and address pressure issues From tberg at snf.stanford.edu Wed Jan 26 06:01:18 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Jan 2011 06:01:18 -0800 Subject: Shutdown epi2 SNF 2011-01-26 06:01:18: replacing pump Message-ID: From tberg at snf.stanford.edu Wed Jan 26 09:44:05 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Jan 2011 09:44:05 -0800 Subject: Comment epi2 SNF 2011-01-24 10:29:33: Wafer in LLA and no Note Message-ID: Maurice wafer-removed From tberg at snf.stanford.edu Wed Jan 26 09:45:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Jan 2011 09:45:40 -0800 Subject: Comment epi2 SNF 2011-01-25 14:33:35: New Pump arrives tomorrow Message-ID: New Pump installed and tested-ran Dope flow and GeEtch coat no problem. Checked throttle valve home fine From tberg at snf.stanford.edu Wed Jan 26 09:45:51 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Jan 2011 09:45:51 -0800 Subject: Shutdown epi2 SNF 2011-01-26 06:01:18: replacing pump Message-ID: New Pump installed and tested-ran Dope flow and GeEtch coat no problem. Checked throttle valve home fine From tberg at snf.stanford.edu Wed Jan 26 09:46:02 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Jan 2011 09:46:02 -0800 Subject: Comment epi2 SNF 2011-01-21 14:26:38: Cleaned Throttle valve Message-ID: New Pump installed and tested-ran Dope flow and GeEtch coat no problem. Checked throttle valve home fine From tberg at snf.stanford.edu Wed Jan 26 09:46:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Jan 2011 09:46:11 -0800 Subject: Comment epi2 SNF 2011-01-18 13:08:09: Cleaned Throttle valve Message-ID: New Pump installed and tested-ran Dope flow and GeEtch coat no problem. Checked throttle valve home fine From maurice at snf.stanford.edu Wed Jan 26 10:58:56 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 10:58:56 -0800 Subject: Comment epi2 SNF 2011-01-24 11:30:36: Pressure control Message-ID: new pump installed. Were can run 30 SLM H2 down at 15 torr From maurice at snf.stanford.edu Wed Jan 26 11:00:00 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:00:00 -0800 Subject: Comment epi2 SNF 2011-01-21 01:22:12: epi2 running but with pressure issue Message-ID: new pump installed. system can now handle lower pressures From maurice at snf.stanford.edu Wed Jan 26 11:00:10 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:00:10 -0800 Subject: Problem epi2 SNF 2011-01-19 19:23:16: Throttle valve -pressure control Message-ID: new pump installed. system can now handle lower pressures From maurice at snf.stanford.edu Wed Jan 26 11:00:25 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:00:25 -0800 Subject: Problem epi2 SNF 2011-01-18 11:32:42: ChA Pressure Control Valve failed to close Message-ID: new pump installed. system can now handle lower pressures From maurice at snf.stanford.edu Wed Jan 26 11:00:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:00:57 -0800 Subject: Problem epi2 SNF 2011-01-15 14:32:32: repeat problem: chA valve Message-ID: PCV cleaned new pump installed. system can now handle lower pressures From maurice at snf.stanford.edu Wed Jan 26 11:05:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:05:57 -0800 Subject: Problem epi2 SNF 2011-01-14 10:49:00: ChA Pressure control Valve Message-ID: new pump installed. system can now handle lower pressures From maurice at snf.stanford.edu Wed Jan 26 11:06:30 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:06:30 -0800 Subject: Comment epi2 SNF 2011-01-13 15:14:14: Pressure Deviation Message-ID: new pump installed. system can now handle lower pressures From maurice at snf.stanford.edu Wed Jan 26 11:07:24 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:07:24 -0800 Subject: Problem epi2 SNF 2011-01-13 10:47:59: Pressure does not go down to 15 Torr Message-ID: new pump installed. system can now handle 15 torr From maurice at snf.stanford.edu Wed Jan 26 11:07:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:07:41 -0800 Subject: Problem epi2 SNF 2011-01-07 17:07:48: Pressure deviation errors Message-ID: logged From ehe at snf.stanford.edu Thu Jan 27 07:30:18 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 27 Jan 2011 07:30:18 -0800 Subject: Problem epi2 SNF 2011-01-27 07:30:17: dop2 flow deviation Message-ID: DOP2 deviated 28% during recipe run - I was not there to see what happened but after recipe aborted I ran a flow test to check and DOP2 flow was ok - valve in back also ok. Repeatedly got message "ChA prevent further action because of fault detected" when trying to get it back online. Wafer still in ChA. From zpatel at snf.stanford.edu Thu Jan 27 11:56:06 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Thu, 27 Jan 2011 11:56:06 -0800 Subject: Problem epi2 SNF 2011-01-27 11:56:06: Chamber was over pressured during Ge Etch run Message-ID: Chamber was over pressured 1atm during Ge etch run From seymour at snf.stanford.edu Fri Jan 28 08:55:54 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 28 Jan 2011 08:55:54 -0800 Subject: Problem epi2 SNF 2011-01-27 07:30:17: dop2 flow deviation Message-ID: replaced 100 ppm diborane anfd leak check passed. cylinder is now on to the tool. From maurice at snf.stanford.edu Fri Jan 28 11:26:37 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Jan 2011 11:26:37 -0800 Subject: Problem epi2 SNF 2011-01-28 11:26:35: can't run 15 torr/ 25 SLM H2 Message-ID: dwnam, aslume and takashi all report that they are not able to get 15 torr with H2 at 25 SLM. - I reducied H2 to 15 SLM and could only get down to 22 torr. - Right after the new pump was installed I was able to get 15 torr with 25 SLM H2 From tberg at snf.stanford.edu Fri Jan 28 12:36:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 28 Jan 2011 12:36:41 -0800 Subject: Problem epi2 SNF 2011-01-28 11:26:35: can't run 15 torr/ 25 SLM H2 Message-ID: Blower on pump is not functional again From maurice at snf.stanford.edu Fri Jan 28 15:18:51 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 28 Jan 2011 15:18:51 -0800 Subject: Comment epi2 SNF 2011-01-28 15:18:50: blower not working/ Message-ID: Ted reports: Blower on pump is not functional again...FS scheduled to come in Monday. - Running recipes with pressure below 40 torr is not recommended until blower is fixed. From ehe at snf.stanford.edu Sun Jan 30 12:58:13 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 30 Jan 2011 12:58:13 -0800 Subject: Problem epi2 SNF 2011-01-30 12:58:12: epi2 computer off? Message-ID: Monitors are on but apparently not receiving information from pc... I don't know how to get the screen to reappear and my email bounced from epi2 listserv so I'm asking for help here. From tberg at snf.stanford.edu Mon Jan 31 06:40:19 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 31 Jan 2011 06:40:19 -0800 Subject: Problem epi2 SNF 2011-01-30 12:58:12: epi2 computer off? Message-ID: touched light pen to front screen and logged on. system was in inert idle. Looking into pumping issues From maurice at snf.stanford.edu Mon Jan 31 09:39:46 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 31 Jan 2011 09:39:46 -0800 Subject: Shutdown epi2 SNF 2011-01-31 09:39:45: pump out for repair Message-ID: could be back wed From maurice at snf.stanford.edu Mon Jan 31 11:23:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 31 Jan 2011 11:23:36 -0800 Subject: Problem epi2 SNF 2011-01-27 11:56:06: Chamber was over pressured during Ge Etch run Message-ID: pump sent out