Problem epi2 SNF 2011-01-07 17:07:48: Pressure deviation errors

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Jan 7 17:07:48 PST 2011


Standard test came out haze free.
I had several pressure diviation errors that  put system in isolation.
I had an overpressure error on my last GeEtch.  The three GeEtches earlier in the day had no problems.
_
I am yellow lighting the system.  Users may  have pressure issues.  Please make comments on coral if you have problems so we can addreess them next week.




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