Problem epi2 SNF 2011-01-07 17:07:48: Pressure deviation errors
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Jan 7 17:07:48 PST 2011
Standard test came out haze free.
I had several pressure diviation errors that put system in isolation.
I had an overpressure error on my last GeEtch. The three GeEtches earlier in the day had no problems.
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I am yellow lighting the system. Users may have pressure issues. Please make comments on coral if you have problems so we can addreess them next week.
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