Problem epi2 SNF 2011-01-11 12:14:43: Ge flow

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Tue Jan 11 12:14:44 PST 2011


Cannot run Ge flow of 2 sccm with Silane flow of 400sccm
Was able to run the same flows yesterday. (same reciepe)




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