Comment epi2 SNF 2010-11-28 09:40:11: Reset DCS excess flow switch.
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Wed Jan 12 07:20:04 PST 2011
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excess flow sensor replaced
Previous message:
Problem epi2 SNF 2010-12-14 12:07:21: Flat aligner contaminating the wafers
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Shutdown epi2 SNF 2011-01-12 09:15:04: scrubber leak
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