Problem epi2 SNF 2010-12-08 10:39:04: Pressure deviation

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Jan 12 10:50:48 PST 2011

Previous message: Shutdown epi2 SNF 2011-01-12 09:15:04: scrubber leak
Next message: Problem epi2 SNF 2011-01-13 07:44:00: Fatal fault of wafer from Loadlock A slot 1
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

This was a reporting a pressure problem with the Ge etch program.  The program has been modified and is not giving any problems.

Previous message: Shutdown epi2 SNF 2011-01-12 09:15:04: scrubber leak
Next message: Problem epi2 SNF 2011-01-13 07:44:00: Fatal fault of wafer from Loadlock A slot 1
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list