Problem epi2 SNF 2010-12-08 10:39:04: Pressure deviation

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Jan 12 10:50:48 PST 2011


This was a reporting a pressure problem with the Ge etch program.  The program has been modified and is not giving any problems.




More information about the epi2-pcs mailing list