Problem epi2 SNF 2011-01-13 07:44:00: Fatal fault of wafer from Loadlock A slot 1

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Thu Jan 13 07:44:00 PST 2011


Preveous user's process was stopped by error of "Fatal fault of wafer from Load lock A slot 1 - 158" and " Pressure deviation".
Please recover the tool.




More information about the epi2-pcs mailing list