Problem epi2 SNF 2011-01-13 10:47:59: Pressure does not go down to 15 Torr

takashifuse at snf.stanford.edu takashifuse at snf.stanford.edu
Thu Jan 13 10:47:59 PST 2011


My recipe didn't run by error of pressure deviation.
The recipe is 25slm H2 flow and 15 Torr pressure, but the chamber pressure is not going down to 15 torr... it was going to about 45 Torr.




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