Comment epi2 SNF 2011-01-13 15:14:14: Pressure Deviation

edfei at snf.stanford.edu edfei at snf.stanford.edu
Thu Jan 13 15:14:15 PST 2011


Chamber pressure will not go down to set point and gives a pressure deviation warning.  set point of 40T will result in about 55T chamber pressure, and set point of 15T will end the recipe and set the chamber in isolation.




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