Problem epi2 SNF 2011-01-15 14:32:32: repeat problem: chA valve

ehe at snf.stanford.edu ehe at snf.stanford.edu
Sat Jan 15 14:32:32 PST 2011


chA press cont vavle never reached home sensor in minus direction
chA pressure setpoint deviation fault
ChA pressure control valve failed to close
Ge Etch was fine but these errors cropped up at the beginning of every recipe run attempt. Retried several times, no change.




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