Problem epi2 SNF 2011-01-19 19:23:16: Throttle valve -pressure control

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Wed Jan 19 19:23:17 PST 2011


Valve not able to handle gas flows 
Dopant flow test fails when 
Pressure set at 30T  and H2 flow is 30SLM
For a  H2 flow of 20slm  it  maintain pressure at 44T (set point is 30T).
Deposition at 50 Torr not clean
Could be because of concern with pressure control.




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