Comment epi2 SNF 2011-01-21 01:22:12: epi2 running but with pressure issue

ehe at snf.stanford.edu ehe at snf.stanford.edu
Fri Jan 21 01:22:13 PST 2011


Pressure issue still needs to be addressed per previous user's comment. Experienced same problem during the dopant flow test recipe - pressure couldn't stabilize below about 50T, so I had to increase pressure on recipes. Trying to run first recipe overnight, will report any errors Fri morning.




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