Comment epi2 SNF 2011-01-22 08:18:08: pressure problem and can't run in automatic

ehe at snf.stanford.edu ehe at snf.stanford.edu
Sat Jan 22 08:18:09 PST 2011


Can't run in automatic mode since Thurs night - reports chA not online even though it clearly is. Also chF goes offline when trying to return wafers, chF seemed to be correctable though. ChA pressure errors and ChA pressure valve failed to close error at end of etch recipe.




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