Comment epi2 SNF 2011-01-22 08:18:08: pressure problem and can't run in automatic

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Jan 24 09:46:51 PST 2011


Ted ran Ge etch with no problem.
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I also ran aGe etch with no issues.
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System stated is was offline but it was also in active idle?!?!
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We then loaded a wafer and ran "KENTEST2" in auto mode.  The system loaded wafer, ran program, unloaded wafer and ran Ge etch program with no issues.
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KENTEST2 runs with pressure at 30torr and H2 flow of 15 SLM




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