Comment epi2 SNF 2011-01-24 11:30:36: Pressure control

zpatel at snf.stanford.edu zpatel at snf.stanford.edu
Mon Jan 24 11:30:36 PST 2011


Valve not able to handle gas flows 
Dopant flow test fails when 
Pressure set at 30T  and H2 flow is 30SLM
For a  H2 flow of 20slm  it  maintain pressure at 44T (set point is 30T).




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