Comment epi2 SNF 2011-01-24 11:30:36: Pressure control
zpatel at snf.stanford.edu
zpatel at snf.stanford.edu
Mon Jan 24 11:30:36 PST 2011
Valve not able to handle gas flows
Dopant flow test fails when
Pressure set at 30T and H2 flow is 30SLM
For a H2 flow of 20slm it maintain pressure at 44T (set point is 30T).
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