Problem epi2 SNF 2011-01-27 07:30:17: dop2 flow deviation

ehe at snf.stanford.edu ehe at snf.stanford.edu
Thu Jan 27 07:30:18 PST 2011


DOP2 deviated 28% during recipe run - I was not there to see what happened but after recipe aborted I ran a flow test to check and DOP2 flow was ok - valve in back also ok. Repeatedly got message "ChA prevent further action because of fault detected" when trying to get it back online. Wafer still in ChA.




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