Problem epi2 SNF 2011-01-28 11:26:35: can't run 15 torr/ 25 SLM H2

maurice at maurice at
Fri Jan 28 11:26:37 PST 2011

dwnam, aslume and takashi all report that  they are not able to get 15 torr with H2 at 25 SLM.
I reducied H2 to 15 SLM and could only get down to 22 torr.
Right after the new pump was installed I was able to get 15 torr with 25 SLM H2

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