January 2011 Archives by date

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Starting: Mon Jan 3 16:29:31 PST 2011
Ending: Mon Jan 31 11:23:36 PST 2011
Messages: 66

Shutdown epi2 SNF 2011-01-03 16:29:31: lower lamp failure during testing maurice at snf.stanford.edu
Comment epi2 SNF 2011-01-04 14:17:24: Changed all lower lamps tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-05 14:16:10: Testing HCl gas panel tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-01-03 16:29:31: lower lamp failure during testing tberg at snf.stanford.edu
Problem epi2 SNF 2010-12-22 10:31:19: no gases at this time tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-04 14:17:24: Changed all lower lamps tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-05 14:16:10: Testing HCl gas panel tberg at snf.stanford.edu
Comment epi2 SNF 2010-12-02 09:47:49: Epi update tberg at snf.stanford.edu
Problem epi2 SNF 2011-01-07 07:29:01: Needs Qual tberg at snf.stanford.edu
Problem epi2 SNF 2011-01-07 07:29:01: Needs Qual maurice at snf.stanford.edu
Comment epi2 SNF 2010-12-14 12:55:00: Flatfinder is Messed up-DO NOT USE maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-07 17:07:48: Pressure deviation errors maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-09 15:50:05: No Dopant gas flows ??? zpatel at snf.stanford.edu
Problem epi2 SNF 2011-01-09 15:50:05: No Dopant gas flows ??? tberg at snf.stanford.edu
Problem epi2 SNF 2011-01-11 12:14:43: Ge flow zpatel at snf.stanford.edu
Problem epi2 SNF 2011-01-11 12:32:17: GeH4 is Empty tberg at snf.stanford.edu
Problem epi2 SNF 2010-12-14 12:07:21: Flat aligner contaminating the wafers seymour at snf.stanford.edu
Problem epi2 SNF 2011-01-11 12:14:43: Ge flow seymour at snf.stanford.edu
Comment epi2 SNF 2010-11-28 09:40:11: Reset DCS excess flow switch. seymour at snf.stanford.edu
Problem epi2 SNF 2011-01-11 12:32:17: GeH4 is Empty seymour at snf.stanford.edu
Shutdown epi2 SNF 2011-01-12 09:15:04: scrubber leak maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-01-12 09:15:04: scrubber leak maurice at snf.stanford.edu
Problem epi2 SNF 2010-12-08 10:39:04: Pressure deviation maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-13 07:44:00: Fatal fault of wafer from Loadlock A slot 1 takashifuse at snf.stanford.edu
Problem epi2 SNF 2011-01-13 07:44:00: Fatal fault of wafer from Loadlock A slot 1 maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-13 10:47:59: Pressure does not go down to 15 Torr takashifuse at snf.stanford.edu
Comment epi2 SNF 2011-01-13 15:14:14: Pressure Deviation edfei at snf.stanford.edu
Problem epi2 SNF 2011-01-14 10:49:00: ChA Pressure control Valve edfei at snf.stanford.edu
Problem epi2 SNF 2011-01-15 14:32:32: repeat problem: chA valve ehe at snf.stanford.edu
Problem epi2 SNF 2011-01-18 11:32:42: ChA Pressure Control Valve failed to close alsune at snf.stanford.edu
Comment epi2 SNF 2011-01-18 13:08:09: Cleaned Throttle valve tberg at snf.stanford.edu
Problem epi2 SNF 2011-01-19 19:23:16: Throttle valve -pressure control zpatel at snf.stanford.edu
Comment epi2 SNF 2011-01-21 01:22:12: epi2 running but with pressure issue ehe at snf.stanford.edu
Shutdown epi2 SNF 2011-01-21 12:21:14: won't go online maurice at snf.stanford.edu
Comment epi2 SNF 2011-01-21 14:26:38: Cleaned Throttle valve tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-01-21 12:21:14: won't go online maurice at snf.stanford.edu
Comment epi2 SNF 2011-01-22 08:18:08: pressure problem and can't run in automatic ehe at snf.stanford.edu
Comment epi2 SNF 2011-01-22 08:18:08: pressure problem and can't run in automatic maurice at snf.stanford.edu
Comment epi2 SNF 2011-01-24 10:29:33: Wafer in LLA and no Note zpatel at snf.stanford.edu
Comment epi2 SNF 2011-01-24 11:30:36: Pressure control zpatel at snf.stanford.edu
Comment epi2 SNF 2011-01-25 14:33:35: New Pump arrives tomorrow tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-01-26 06:01:18: replacing pump tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-24 10:29:33: Wafer in LLA and no Note tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-25 14:33:35: New Pump arrives tomorrow tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-01-26 06:01:18: replacing pump tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-21 14:26:38: Cleaned Throttle valve tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-18 13:08:09: Cleaned Throttle valve tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-24 11:30:36: Pressure control maurice at snf.stanford.edu
Comment epi2 SNF 2011-01-21 01:22:12: epi2 running but with pressure issue maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-19 19:23:16: Throttle valve -pressure control maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-18 11:32:42: ChA Pressure Control Valve failed to close maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-15 14:32:32: repeat problem: chA valve maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-14 10:49:00: ChA Pressure control Valve maurice at snf.stanford.edu
Comment epi2 SNF 2011-01-13 15:14:14: Pressure Deviation maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-13 10:47:59: Pressure does not go down to 15 Torr maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-07 17:07:48: Pressure deviation errors maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-27 07:30:17: dop2 flow deviation ehe at snf.stanford.edu
Problem epi2 SNF 2011-01-27 11:56:06: Chamber was over pressured during Ge Etch run zpatel at snf.stanford.edu
Problem epi2 SNF 2011-01-27 07:30:17: dop2 flow deviation seymour at snf.stanford.edu
Problem epi2 SNF 2011-01-28 11:26:35: can't run 15 torr/ 25 SLM H2 maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-28 11:26:35: can't run 15 torr/ 25 SLM H2 tberg at snf.stanford.edu
Comment epi2 SNF 2011-01-28 15:18:50: blower not working/ maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-30 12:58:12: epi2 computer off? ehe at snf.stanford.edu
Problem epi2 SNF 2011-01-30 12:58:12: epi2 computer off? tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-01-31 09:39:45: pump out for repair maurice at snf.stanford.edu
Problem epi2 SNF 2011-01-27 11:56:06: Chamber was over pressured during Ge Etch run maurice at snf.stanford.edu

Last message date: Mon Jan 31 11:23:36 PST 2011
Archived on: Sun Dec 23 08:52:57 PST 2012

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