From narii at snf.stanford.edu Sun Jul 3 22:25:47 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 3 Jul 2011 22:25:47 -0700 Subject: Problem epi2 SNF 2011-07-03 22:25:46: Robot arm errror Message-ID: Transfer arm keeps showing 'center finder error' while running from LLA. Tried LLB instead, and had 'motor syncronization error'. Wafers are in LLB 1,2,3 and 25. Unable to close slit between xfer chamber and LLB, thus unable to unload wafers. From tberg at snf.stanford.edu Wed Jul 6 06:10:19 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 6 Jul 2011 06:10:19 -0700 Subject: Shutdown epi2 SNF 2011-07-06 06:10:18: hanging new chamber Message-ID: From tberg at snf.stanford.edu Thu Jul 7 09:37:34 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:37:34 -0700 Subject: Comment epi2 SNF 2011-07-07 09:37:33: chamber hung Message-ID: Chamber was attached to main frame yesterday. electrician is working on Circuit breaker, contactor, and SCR driver mounting. From tberg at snf.stanford.edu Fri Jul 8 14:06:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 8 Jul 2011 14:06:49 -0700 Subject: Comment epi2 SNF 2011-07-08 14:06:48: System is back together Message-ID: Chamber B is hung. System is back together. Contactor, circuit breaker and SCR pack for chamber B are installed. System is now running GEETCHCOAT. and then will be over to Maurice for testing. Thanks to all for your patience as we move ahead with the install. From tberg at snf.stanford.edu Fri Jul 8 14:08:03 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 8 Jul 2011 14:08:03 -0700 Subject: Problem epi2 SNF 2011-07-03 22:25:46: Robot arm errror Message-ID: robot had hit cassette rehomed all robot axis From maurice at snf.stanford.edu Fri Jul 8 15:03:05 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 8 Jul 2011 15:03:05 -0700 Subject: Shutdown epi2 SNF 2011-07-06 06:10:18: hanging new chamber Message-ID: System back up after 2nd chamber hung (see Ted's coral entry for details). Ran several etches and a silicon deposition. Wafer handling ok. System up. From dongrip at snf.stanford.edu Sun Jul 10 18:19:45 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 10 Jul 2011 18:19:45 -0700 Subject: Problem epi2 SNF 2011-07-10 18:19:44: DCS flow deviated by 100% Message-ID: looks DCS is empty. From tberg at snf.stanford.edu Mon Jul 11 06:31:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Jul 2011 06:31:56 -0700 Subject: Problem epi2 SNF 2011-07-10 18:19:44: DCS flow deviated by 100% Message-ID: Reset excess flow pressure is at 6.5 From tberg at snf.stanford.edu Mon Jul 11 06:32:15 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Jul 2011 06:32:15 -0700 Subject: Comment epi2 SNF 2011-07-08 14:06:48: System is back together Message-ID: noted From tberg at snf.stanford.edu Mon Jul 11 06:32:34 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Jul 2011 06:32:34 -0700 Subject: Comment epi2 SNF 2011-07-07 09:37:33: chamber hung Message-ID: noted From tberg at snf.stanford.edu Mon Jul 11 07:56:59 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Jul 2011 07:56:59 -0700 Subject: Comment epi2 SNF 2011-07-11 07:56:59: Ran GEETCHCOAT Message-ID: Ran GEETCHCOAT. All flows and temps stable From tberg at snf.stanford.edu Mon Jul 18 06:08:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jul 2011 06:08:44 -0700 Subject: Shutdown epi2 SNF 2011-07-18 06:08:43: Hcl empty Message-ID: From tberg at snf.stanford.edu Mon Jul 18 13:02:48 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jul 2011 13:02:48 -0700 Subject: Shutdown epi2 SNF 2011-07-18 06:08:43: Hcl empty Message-ID: Replaced HCL cylinder. leak checked. Turned on ran geetchcoat no problem cooling down to inert idle now From tberg at snf.stanford.edu Wed Jul 20 06:20:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Jul 2011 06:20:25 -0700 Subject: Comment epi2 SNF 2011-05-17 15:14:50: light pen not working very well Message-ID: replaced From tberg at snf.stanford.edu Wed Jul 20 06:20:36 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Jul 2011 06:20:36 -0700 Subject: Comment epi2 SNF 2011-07-11 07:56:59: Ran GEETCHCOAT Message-ID: noted From narii at snf.stanford.edu Fri Jul 22 21:25:58 2011 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Fri, 22 Jul 2011 21:25:58 -0700 Subject: Problem epi2 SNF 2011-07-22 21:25:57: LLA door problem Message-ID: While opening LLA door, error message "LLA door open failed" occured. However, it opens regardless the error message. From tberg at snf.stanford.edu Mon Jul 25 08:02:02 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jul 2011 08:02:02 -0700 Subject: Problem epi2 SNF 2011-07-22 21:25:57: LLA door problem Message-ID: Reset door status now it is correct From zpatel at snf.stanford.edu Mon Jul 25 12:29:02 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 25 Jul 2011 12:29:02 -0700 Subject: Problem epi2 SNF 2011-07-25 12:29:02: LLA open door failed error Message-ID: LLA: the door opens when opened but gives an error message LLA open door failed (while closing) From maurice at snf.stanford.edu Mon Jul 25 18:03:04 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 25 Jul 2011 18:03:04 -0700 Subject: Problem epi2 SNF 2011-07-25 12:29:02: LLA open door failed error Message-ID: closed door using digital I/O From ehe at snf.stanford.edu Tue Jul 26 02:08:13 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 26 Jul 2011 02:08:13 -0700 Subject: Problem epi2 SNF 2011-07-26 02:08:12: LLA and LLB issues Message-ID: Wafer could not return to LLB in automatic mode due to some slit or pump error. Had to return wafer to LLA manually. Then had trouble with doors not closing but found a work-around and was able to close both doors. From maurice at snf.stanford.edu Tue Jul 26 16:14:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 26 Jul 2011 16:14:19 -0700 Subject: Shutdown epi2 SNF 2011-07-26 16:14:19: Electrician pulling cables for 2nd chamber Message-ID: From tberg at snf.stanford.edu Fri Jul 29 10:04:35 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Jul 2011 10:04:35 -0700 Subject: Shutdown epi2 SNF 2011-07-26 16:14:19: Electrician pulling cables for 2nd chamber Message-ID: Electrician is finished. System is back up. ran etch coat recipe no problem. From tberg at stanford.edu Fri Jul 29 10:08:04 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 29 Jul 2011 10:08:04 -0700 Subject: Reservations cancelled Message-ID: <4E32E8F4.5010704@stanford.edu> Hello All, The work on epi 2 chamber B is finished for now tool is now available. Ted From dongrip at snf.stanford.edu Fri Jul 29 21:40:38 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 29 Jul 2011 21:40:38 -0700 Subject: Problem epi2 SNF 2011-07-29 21:40:37: LLA isn't still working. LLB is ok to use. Message-ID: