Problem epi2 SNF 2011-07-03 22:25:46: Robot arm errror

narii at snf.stanford.edu narii at snf.stanford.edu
Sun Jul 3 22:25:47 PDT 2011


Transfer arm keeps showing 'center finder error' while running from LLA. Tried LLB instead, and had 'motor syncronization error'. Wafers are in LLB 1,2,3 and 25. Unable to close slit between xfer chamber and LLB, thus unable to unload wafers.




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