Shutdown epi2 SNF 2011-07-06 06:10:18: hanging new chamber

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Jul 8 15:03:05 PDT 2011


System back up after 2nd chamber hung (see Ted's coral entry for details).
Ran several etches and a silicon deposition.
Wafer handling ok.
System up.




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