Problem epi2 SNF 2011-07-26 02:08:12: LLA and LLB issues

ehe at snf.stanford.edu ehe at snf.stanford.edu
Tue Jul 26 02:08:13 PDT 2011


Wafer could not return to LLB in automatic mode due to some slit or pump error. Had to return wafer to LLA manually. Then had trouble with doors not closing but found a work-around and was able to close both doors.




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