From maurice at snf.stanford.edu Wed Jun 1 10:45:04 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Jun 2011 10:45:04 -0700 Subject: Shutdown epi2 SNF 2011-05-29 16:26:09: Broken wafer in transfer chamber Message-ID: Ted vented Xfer chamber, removed broken wafers, wiped out chamber, inspected wand, and pumped down chamber. Wafer drop from both LL were centered. Ran Ge etch twice. From maurice at snf.stanford.edu Wed Jun 1 10:45:32 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Jun 2011 10:45:32 -0700 Subject: Problem epi2 SNF 2011-05-28 17:14:14: chamber a wafer slide detected Message-ID: Ted vented Xfer chamber, removed broken wafers, wiped out chamber, inspected wand, and pumped down chamber. Wafer drop from both LL were centered. Ran Ge etch twice. From maurice at snf.stanford.edu Wed Jun 1 10:51:51 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Jun 2011 10:51:51 -0700 Subject: Comment epi2 SNF 2011-05-25 07:30:40: anyone using DSP wafers Message-ID: DSP are not an issue. Both DSP and SSP have slide errors From maurice at snf.stanford.edu Wed Jun 1 10:52:03 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Jun 2011 10:52:03 -0700 Subject: Comment epi2 SNF 2011-04-19 10:32:39: dome inspected...clear Message-ID: logged From maurice at snf.stanford.edu Wed Jun 1 10:52:13 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 1 Jun 2011 10:52:13 -0700 Subject: Comment epi2 SNF 2011-04-14 14:04:00: SiH4 6% deviation Message-ID: logged From tberg at stanford.edu Thu Jun 2 12:44:34 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 02 Jun 2011 12:44:34 -0700 Subject: Germane is low Message-ID: <4DE7E822.3050005@stanford.edu> Hello All, Just a heads up for all Germane users. Germane is at 9 pounds and will probably run out soon. It has dropped 80 pounds in the past 2 weeks. It is on order but we do not have a definite delivery date yet. Watch http://snf-gaugereader/wgrwebapp/Default_WGR.aspx number 22 to see the pressure. ted From ehe at snf.stanford.edu Thu Jun 2 17:21:54 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 2 Jun 2011 17:21:54 -0700 Subject: Comment epi2 SNF 2011-06-02 17:21:54: hazy wafers Message-ID: Of the last 6 SiGe wafers I ran, two were perfectly clear. The rest were hazy or extremely hazy. Hazy/clear wafers had the same recipes. The only difference seems to be that the clear wafers had an extra etch before deposition. From tberg at snf.stanford.edu Fri Jun 3 08:24:14 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 3 Jun 2011 08:24:14 -0700 Subject: Problem epi2 SNF 2011-06-03 08:24:14: No Germane Message-ID: Changing cylinders From tberg at snf.stanford.edu Fri Jun 3 08:56:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 3 Jun 2011 08:56:44 -0700 Subject: Comment epi2 SNF 2011-06-03 08:56:43: Cylinder changed with diffusion Message-ID: Cylinder changed with diffusion in leak check From seymour at snf.stanford.edu Fri Jun 3 14:07:35 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Jun 2011 14:07:35 -0700 Subject: Problem epi2 SNF 2011-06-03 08:24:14: No Germane Message-ID: germane cylinder changed and leak check passed. ok to use From seymour at snf.stanford.edu Fri Jun 3 14:09:00 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Jun 2011 14:09:00 -0700 Subject: Comment epi2 SNF 2011-06-03 14:09:00: ok to run germane Message-ID: cylinder of germane passed leak check From sclaussen at snf.stanford.edu Mon Jun 6 23:59:16 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 6 Jun 2011 23:59:16 -0700 Subject: Problem epi2 SNF 2011-06-06 23:59:16: Global DOP2 deviated by 45% Message-ID: The recipe aborted at this point. Chamber sat in Isolated state for a few hours. From tberg at stanford.edu Tue Jun 7 06:22:09 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Jun 2011 06:22:09 -0700 Subject: Low concentration B2H6 is very low Message-ID: <4DEE2601.2040703@stanford.edu> Hello All, Low concentration B2H6 is very low. Another cylinder is due shortly. Please use caution on critical Runs of this gas since it may run out and users had flow issues last night. Ted From tberg at snf.stanford.edu Tue Jun 7 06:23:14 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Jun 2011 06:23:14 -0700 Subject: Comment epi2 SNF 2011-06-07 06:23:14: Low concentration B2H6 is very low Message-ID: Use caution on critical runs From tberg at snf.stanford.edu Tue Jun 7 13:49:11 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Jun 2011 13:49:11 -0700 Subject: Comment epi2 SNF 2011-06-03 08:56:43: Cylinder changed with diffusion Message-ID: Completed From tberg at stanford.edu Wed Jun 8 11:37:29 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Jun 2011 11:37:29 -0700 Subject: Bad News B2H6 will not be here until tomorrow Message-ID: <4DEFC169.4050906@stanford.edu> Bad News B2H6 will not be here until tomorrow. According to the trucking company. ted From tberg at snf.stanford.edu Wed Jun 8 12:19:14 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Jun 2011 12:19:14 -0700 Subject: Comment epi2 SNF 2011-06-08 12:19:13: Changing 100 PPM B2H6 cylinder Message-ID: Changing 100 PPM B2H6 cylinder. will be in leak check after change From tberg at snf.stanford.edu Wed Jun 8 12:40:29 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Jun 2011 12:40:29 -0700 Subject: Comment epi2 SNF 2011-06-07 06:23:14: Low concentration B2H6 is very low Message-ID: Cylinder is changed and in leak check From tberg at snf.stanford.edu Wed Jun 8 12:40:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 8 Jun 2011 12:40:41 -0700 Subject: Comment epi2 SNF 2011-06-08 12:40:40: Cylinder is changed and in leak check Message-ID: From tberg at stanford.edu Wed Jun 8 12:41:38 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Jun 2011 12:41:38 -0700 Subject: B2H6 is here after all Message-ID: <4DEFD072.1050802@stanford.edu> Hello All, B2H6 100 PPM is here after all.Cylinder is changed and in leak check. From tberg at snf.stanford.edu Thu Jun 9 06:07:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Jun 2011 06:07:40 -0700 Subject: Comment epi2 SNF 2011-06-03 14:09:00: ok to run germane Message-ID: Cylinder is back on and OK to run From tberg at snf.stanford.edu Thu Jun 9 06:08:00 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Jun 2011 06:08:00 -0700 Subject: Problem epi2 SNF 2011-06-06 23:59:16: Global DOP2 deviated by 45% Message-ID: New Cylinder is back on and OK to run From tberg at snf.stanford.edu Thu Jun 9 06:08:13 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Jun 2011 06:08:13 -0700 Subject: Comment epi2 SNF 2011-06-08 12:19:13: Changing 100 PPM B2H6 cylinder Message-ID: Cylinder is back on and OK to run From tberg at snf.stanford.edu Thu Jun 9 06:08:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Jun 2011 06:08:21 -0700 Subject: Comment epi2 SNF 2011-06-08 12:40:40: Cylinder is changed and in leak check Message-ID: Cylinder is back on and OK to run From tberg at snf.stanford.edu Thu Jun 9 13:54:00 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 9 Jun 2011 13:54:00 -0700 Subject: Shutdown epi2 SNF 2011-06-09 13:54:00: DOME coated Message-ID: DOME coated Running moetch From maurice at snf.stanford.edu Thu Jun 9 14:40:52 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 9 Jun 2011 14:40:52 -0700 Subject: Comment epi2 SNF 2011-06-09 14:40:52: 2 min to Ge etch Message-ID: Added 2 min to Ge etch recipe. Several users have reported hazy wafers and Ted found dome coated From maurice at snf.stanford.edu Thu Jun 9 15:28:15 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 9 Jun 2011 15:28:15 -0700 Subject: Shutdown epi2 SNF 2011-06-09 13:54:00: DOME coated Message-ID: RAN 3 ETCHES TO CLEAR DOME From maurice at snf.stanford.edu Thu Jun 9 15:28:41 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 9 Jun 2011 15:28:41 -0700 Subject: Comment epi2 SNF 2011-06-02 17:21:54: hazy wafers Message-ID: ADDED TWO MINUTES TO GE ETCH RECIPE From seymour at snf.stanford.edu Fri Jun 10 08:00:01 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Jun 2011 08:00:01 -0700 Subject: Problem epi2 SNF 2011-06-10 08:00:01: changing HCL cylinder Message-ID: From maurice at snf.stanford.edu Fri Jun 10 11:07:48 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Jun 2011 11:07:48 -0700 Subject: Shutdown epi2 SNF 2011-06-10 11:07:47: scheduled HCL bottle change Message-ID: From maurice at snf.stanford.edu Fri Jun 10 14:28:08 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Jun 2011 14:28:08 -0700 Subject: Problem epi2 SNF 2011-06-10 08:00:01: changing HCL cylinder Message-ID: past leak check From maurice at snf.stanford.edu Fri Jun 10 14:28:52 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 10 Jun 2011 14:28:52 -0700 Subject: Shutdown epi2 SNF 2011-06-10 11:07:47: scheduled HCL bottle change Message-ID: bottle changed, passed leak check, ran etch recipe From dwnam at snf.stanford.edu Mon Jun 13 00:02:34 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Mon, 13 Jun 2011 00:02:34 -0700 Subject: Problem epi2 SNF 2011-06-13 00:02:34: Centerfinder error Message-ID: I cannot get the wafer out so released the reservation. From tberg at snf.stanford.edu Mon Jun 13 07:22:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 13 Jun 2011 07:22:30 -0700 Subject: Problem epi2 SNF 2011-06-13 00:02:34: Centerfinder error Message-ID: Moved wafer from transfer chamber to LLb position 8 From ehe at snf.stanford.edu Tue Jun 14 10:40:53 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 14 Jun 2011 10:40:53 -0700 Subject: Comment epi2 SNF 2011-06-14 10:40:52: recommend running multiple etches Message-ID: less haze on wafers after more etches From tberg at snf.stanford.edu Thu Jun 16 07:24:37 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Jun 2011 07:24:37 -0700 Subject: Comment epi2 SNF 2011-06-16 07:24:37: Cleaned guardian, back at temp Message-ID: From tberg at snf.stanford.edu Thu Jun 16 07:24:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 16 Jun 2011 07:24:50 -0700 Subject: Comment epi2 SNF 2011-05-24 10:43:21: be sure and enable tool Message-ID: noted From gyama at snf.stanford.edu Mon Jun 20 11:05:59 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 20 Jun 2011 11:05:59 -0700 Subject: Problem epi2 SNF 2011-06-20 11:05:59: OK TO RUN NOW? TGO done? Message-ID: From tberg at snf.stanford.edu Tue Jun 21 05:57:57 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 21 Jun 2011 05:57:57 -0700 Subject: Problem epi2 SNF 2011-06-20 11:05:59: OK TO RUN NOW? TGO done? Message-ID: All gases and burn box back on. From maurice at snf.stanford.edu Thu Jun 23 13:53:42 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 23 Jun 2011 13:53:42 -0700 Subject: Shutdown epi2 SNF 2011-06-23 13:53:42: dome coated Message-ID: etching dome...will inspect after etching From tberg at snf.stanford.edu Fri Jun 24 08:27:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 24 Jun 2011 08:27:40 -0700 Subject: Comment epi2 SNF 2011-06-24 08:27:40: Removed dome for cleaning Message-ID: Dome was cracked after cleaning. New dome on Order no ETA yet From tberg at snf.stanford.edu Mon Jun 27 13:37:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Jun 2011 13:37:44 -0700 Subject: Comment epi2 SNF 2011-06-16 07:24:37: Cleaned guardian, back at temp Message-ID: noted From tberg at snf.stanford.edu Mon Jun 27 13:38:46 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 27 Jun 2011 13:38:46 -0700 Subject: Comment epi2 SNF 2011-06-27 13:38:45: We may have a dome tomorrow Message-ID: We may have a dome tomorrow. We may be able to borrow one from the new chamber kit. From tberg at snf.stanford.edu Tue Jun 28 07:37:58 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Jun 2011 07:37:58 -0700 Subject: Comment epi2 SNF 2011-06-28 07:37:58: dome is installed Message-ID: dome is installed, and system is cycle purging From tberg at snf.stanford.edu Tue Jun 28 07:38:17 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Jun 2011 07:38:17 -0700 Subject: Comment epi2 SNF 2011-06-24 08:27:40: Removed dome for cleaning Message-ID: Noted From tberg at snf.stanford.edu Tue Jun 28 07:38:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 28 Jun 2011 07:38:50 -0700 Subject: Comment epi2 SNF 2011-06-27 13:38:45: We may have a dome tomorrow Message-ID: dome is installed, and system is cycle purging From maurice at snf.stanford.edu Tue Jun 28 10:06:25 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Jun 2011 10:06:25 -0700 Subject: Comment epi2 SNF 2011-06-28 10:06:24: baking out Message-ID: cycle purges and leak check complete - baking system - active idle power rased from 15000 to 18000 From maurice at snf.stanford.edu Tue Jun 28 15:57:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Jun 2011 15:57:38 -0700 Subject: Comment epi2 SNF 2011-06-28 10:06:24: baking out Message-ID: Baked system for 4 hours. returned active idle power to 15000 Etch chamber Ran three Si depositions followed by Si etches...~2um each No haze From maurice at snf.stanford.edu Tue Jun 28 15:57:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Jun 2011 15:57:57 -0700 Subject: Comment epi2 SNF 2011-06-28 07:37:58: dome is installed Message-ID: complete From maurice at snf.stanford.edu Tue Jun 28 15:59:26 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Jun 2011 15:59:26 -0700 Subject: Shutdown epi2 SNF 2011-06-23 13:53:42: dome coated Message-ID: Dome replaced From edfei at snf.stanford.edu Tue Jun 28 17:56:20 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Tue, 28 Jun 2011 17:56:20 -0700 Subject: Problem epi2 SNF 2011-06-28 17:56:19: Cabinet Open Error Message-ID: ChA is reporting the error that the global blower is open and that the system cabinet is open. From edfei at snf.stanford.edu Tue Jun 28 18:16:24 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Tue, 28 Jun 2011 18:16:24 -0700 Subject: Comment epi2 SNF 2011-06-28 18:16:24: Ignore previous message Message-ID: Sorry, false alarm. i forgot to enable coral From maurice at snf.stanford.edu Tue Jun 28 18:17:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Jun 2011 18:17:50 -0700 Subject: Problem epi2 SNF 2011-06-28 17:56:19: Cabinet Open Error Message-ID: enable tool to clear error From maurice at snf.stanford.edu Tue Jun 28 18:18:08 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 28 Jun 2011 18:18:08 -0700 Subject: Comment epi2 SNF 2011-06-28 18:16:24: Ignore previous message Message-ID: logged From edfei at snf.stanford.edu Tue Jun 28 19:05:26 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Tue, 28 Jun 2011 19:05:26 -0700 Subject: Problem epi2 SNF 2011-06-28 19:05:26: No More HCL Message-ID: The system repeatedly gives the error HCL deviation by ~46% during Ge etch coat. Most likely the HCL tank is low. From tberg at snf.stanford.edu Wed Jun 29 07:43:36 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 29 Jun 2011 07:43:36 -0700 Subject: Problem epi2 SNF 2011-06-28 19:05:26: No More HCL Message-ID: Checked HCL cylinder, pumped out line to cylinder, repressuriized cylinder. Ran GEETCHCOAT and manual gas flows no problem