Problem epi2 SNF 2011-05-28 17:14:14: chamber a wafer slide detected

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Jun 1 10:45:32 PDT 2011


Ted vented Xfer chamber, removed broken wafers, wiped out chamber,  inspected wand, and pumped down chamber.
Wafer drop from both LL were centered.
Ran  Ge etch twice.




More information about the epi2-pcs mailing list