Problem epi2 SNF 2011-05-28 17:14:14: chamber a wafer slide detected

maurice at maurice at
Wed Jun 1 10:45:32 PDT 2011

Ted vented Xfer chamber, removed broken wafers, wiped out chamber,  inspected wand, and pumped down chamber.
Wafer drop from both LL were centered.
Ran  Ge etch twice.

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