Comment epi2 SNF 2011-06-02 17:21:54: hazy wafers

ehe at snf.stanford.edu ehe at snf.stanford.edu
Thu Jun 2 17:21:54 PDT 2011


Of the last 6 SiGe wafers I ran, two were perfectly clear. The rest were hazy or extremely hazy. Hazy/clear wafers had the same recipes. The only difference seems to be that the clear wafers had an extra etch before deposition. 




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