Comment epi2 SNF 2011-06-02 17:21:54: hazy wafers

[ehe at snf.stanford.edu]

Of the last 6 SiGe wafers I ran, two were perfectly clear. The rest were hazy or extremely hazy. Hazy/clear wafers had the same recipes. The only difference seems to be that the clear wafers had an extra etch before deposition.