Shutdown epi2 SNF 2011-06-23 13:53:42: dome coated
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Jun 23 13:53:42 PDT 2011
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Problem epi2 SNF 2011-06-20 11:05:59: OK TO RUN NOW? TGO done?
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Shutdown epi2 SNF 2011-06-23 13:53:42: dome coated
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etching dome...will inspect after etching
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Problem epi2 SNF 2011-06-20 11:05:59: OK TO RUN NOW? TGO done?
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Shutdown epi2 SNF 2011-06-23 13:53:42: dome coated
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