Comment epi2 SNF 2011-06-28 10:06:24: baking out

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jun 28 15:57:38 PDT 2011


Baked system for 4 hours.
returned active idle power to 15000
Etch chamber
Ran three Si depositions followed by Si etches...~2um each
No haze




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