Problem epi2 SNF 2011-06-28 19:05:26: No More HCL

edfei at snf.stanford.edu edfei at snf.stanford.edu
Tue Jun 28 19:05:26 PDT 2011


The system repeatedly gives the error HCL deviation by ~46% during Ge etch coat.  Most likely the HCL tank is low.




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